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Hybridization between Si3N4and SiC films by plasma CVD

✍ Scribed by Kiichiro Kamata; Yuuji Maeda; Minoru Moriyama

Publisher: Springer
Year: 1986
Tongue: English
Weight: 850 KB
Volume: 5
Category: Article
ISSN: 0261-8028
DOI: 10.1007/bf01730280

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