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A comparative study of Si–C–N films on different substrates grown by RF magnetron sputtering

✍ Scribed by A.S. Bhattacharyya; S.K. Mishra; S. Mukherjee; G.C. Das

Book ID: 116604528
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 685 KB
Volume: 478
Category: Article
ISSN: 0925-8388
DOI: 10.1016/j.jallcom.2008.11.105

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