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A Compact Ultrafast Capillary Discharge for EUV Projection Lithography

✍ Scribed by I. Krisch; P. Choi; J. Larour; M. Favre; J. Rous; C. Leblanc

Book ID: 101311428
Publisher: John Wiley and Sons
Year: 2000
Tongue: English
Weight: 324 KB
Volume: 40
Category: Article
ISSN: 0005-8025
DOI: 10.1002/(sici)1521-3986(200004)40:1/2<135::aid-ctpp135>3.0.co;2-f

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