✦ LIBER ✦
A novel fast capillary discharge system emitting intense EUV radiation: Possible source for EUV lithography
✍ Scribed by S.R Mohanty; E Robert; R Dussart; R Viladrosa; J.-M Pouvesle; C Fleurier; C Cachoncinlle
- Book ID
- 108411229
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 624 KB
- Volume
- 65
- Category
- Article
- ISSN
- 0167-9317
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