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A 2D analytical model for SCEs in MOSFETs with high- k gate dielectric

✍ Scribed by Xie, Qian; Xu, Jun; Ren, Tianling; Taur, Yuan


Book ID
117997178
Publisher
Institute of Physics
Year
2010
Tongue
English
Weight
397 KB
Volume
25
Category
Article
ISSN
0268-1242

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An analytical model of fringing capacitances for deep-submicron MOSFET with high-k gate dielectric, including gate dielectric fringing-capacitance and gate electrode fringing-capacitance, is obtained by the conformal-mapping transformation method. It is demonstrated that the fringing-capacitance eff