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ZnO/SiO2-diaphragm composite resonator on a silicon wafer

โœ Scribed by Nakamura, K.; Sasaki, H.; Shimizu, H.


Book ID
118061706
Publisher
The Institution of Electrical Engineers
Year
1981
Tongue
English
Weight
426 KB
Volume
17
Category
Article
ISSN
0013-5194

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