✦ LIBER ✦
Effects of trichloroethane oxidation of silicon wafers on SiO2 and Si properties : A. J. Linssen and H. L. Peek. Philips J. Res.33, (5/6) 281 (1978)
- Publisher
- Elsevier Science
- Year
- 1979
- Tongue
- English
- Weight
- 117 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0026-2714
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