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Zirconia and zirconia–silica thin films deposited by magnetron sputtering

✍ Scribed by D.H Kuo; C.H Chien; C.H Huang

Book ID
114085471
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
512 KB
Volume
420-421
Category
Article
ISSN
0040-6090

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Electrical and structural properties of
Electrical and structural properties of zirconia thin films prepared by reactive magnetron sputtering
✍ K.P.S.S. Hembram; Gargi Dutta; Umesh V. Waghmare; G. Mohan Rao 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 819 KB

Thin films of ZrO 2 were prepared by reactive magnetron sputtering. Annealing of the films exhibited a drastic change in the properties due to improved crystallinity and packing density. The root mean square roughness of the sample observed from atomic force microscope is about 5.75 nm which is comp