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Growth and properties of sputtered zirconia and zirconia–silica thin films

✍ Scribed by D.H. Kuo; C.H. Chien

Book ID: 108388631
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 719 KB
Volume: 429
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(03)00143-3

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