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Young modulus and Poisson ratio measurements of TiO2 thin films deposited with Atomic Layer Deposition

✍ Scribed by L. Borgese; M. Gelfi; E. Bontempi; P. Goudeau; G. Geandier; D. Thiaudière; L.E. Depero

Book ID: 113919583
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 414 KB
Volume: 206
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2011.10.050

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