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YBa2Cu3O7thin-film superconductors on copper substrates by radio-frequency magnetron sputtering

✍ Scribed by E. E. Podkletnov; R. J. O. Järvinen; P. M. J. Vuoristo; T. A. Mäntylä; P. O. Kettunen

Book ID
104920475
Publisher
Springer
Year
1992
Tongue
English
Weight
624 KB
Volume
11
Category
Article
ISSN
0261-8028

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In situ thin films of YBa2Cu3O7 prepared
In situ thin films of YBa2Cu3O7 prepared by single target DC-magnetron sputtering
✍ J.-M. Triscone; M.G. Karkut; O. Brunner; L. Antognazza; M. Decroux; Ø. Fischer 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 347 KB

We have prepared in situ thin films of YBa2fu307 by single target dc reactive magnetron sputtering. By a delicate adjustment of the oxygen partial pressure as well as the total sputtering pressure, we can grow stoichiometric films using a stoichiometric target. This method gives highly reproducible