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XPS study of the reaction of the Si(100) surface with a C2H4 beam

✍ Scribed by T. Takagaki; Y. Igari; T. Takaoka; I. Kusunoki

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
271 KB
Volume
92
Category
Article
ISSN
0169-4332

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