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XPS composition study of stacked Si oxide/Si nitride/Si oxide nano-layers

✍ Scribed by E. Ravizza; S. Spadoni; R. Piagge; P. Comite; C. Wiemer

Book ID: 112206777
Publisher: John Wiley and Sons
Year: 2012
Tongue: English
Weight: 213 KB
Volume: 44
Category: Article
ISSN: 0142-2421
DOI: 10.1002/sia.4943

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