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XPS characterization of the composition and bonding states of elements in CNx layers prepared by ion beam assisted deposition

✍ Scribed by Ujvári, T.; Kolitsch, A.; Tóth, A.; Mohai, M.; Bertóti, I.


Book ID
122579766
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
138 KB
Volume
11
Category
Article
ISSN
0925-9635

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