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Comparison of composition and bonding states of constituents in CNx layers prepared by d.c. plasma and magnetron sputtering

✍ Scribed by I. Bertóti; A. Tóth; M. Mohai; T. Ujvári


Publisher
John Wiley and Sons
Year
2000
Tongue
English
Weight
120 KB
Volume
30
Category
Article
ISSN
0142-2421

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