XPS and TDS studies of trapping states of helium implanted in TiO2
β Scribed by Yuji Baba; Teikichi A. Sasaki
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 501 KB
- Volume
- 152
- Category
- Article
- ISSN
- 0022-3115
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Fine titanium(IV) oxide amorphous powders containing two different amounts of CuO were prepared by the sol-gel process. The samples were crystallized to anatase by heating. The reduction of CuO-TiO 2 samples was investigated by temperature-programmed reduction (TPR). Three types of signals were dete
Using XPS, we have detected severaI oxygen sites on the surface of hydrated TiOz (rutite) crystals. These sites are attributed to chemisorbed and phbsisorbed HzO. XPS spectra of clean TiOz resulting from scrapins in vacuum indicate that oxygens terminate at the very surface. Imptications of these ob
The depth distribution of phosphorus implanted in titanium at 20 keV with doses ranging from 1 Γ 1015 to 3 Γ 1017 cm-2 was investigated by AES, SIMS and XPS. For small doses (O1016 cm-2) Gaussian-like phosphorus proΓles have been observed. For doses > 1017 cm-2 the depth proΓles suggest that a TiP-l