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X-ray study of silicon crystal structure changes due to implantation with fast nitrogen ions

✍ Scribed by D. Żymierska; J. Auleytner; K. Godwod; J. Domagała; L. Datsenko; J. Choiński


Book ID
117620074
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
294 KB
Volume
328
Category
Article
ISSN
0925-8388

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