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X-ray reflectometry of the specific features of structural distortions of He+-implanted Si(001) surface layers

โœ Scribed by Lomov, A. A.; Myakonkikh, A. V.; Rudenko, K. V.; Chesnokov, Yu. M.


Book ID
125394690
Publisher
SP MAIK Nauka/Interperiodica
Year
2014
Tongue
English
Weight
830 KB
Volume
59
Category
Article
ISSN
1063-7745

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