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X-ray production ~13 nm from laser-produced plasmas for projection x-ray lithography applications

✍ Scribed by Kauffman, R. L. ;Phillion, D. W. ;Spitzer, R. C.

Book ID: 115343111
Publisher: The Optical Society
Year: 1993
Tongue: English
Weight: 535 KB
Volume: 32
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.32.006897

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