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X-ray photoelectron spectroscopy of calcium-ion-implanted titanium

✍ Scribed by T. Hanawa; H. Ukai; K. Murakami

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
595 KB
Volume
63
Category
Article
ISSN
0368-2048

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## X-ray photoelectron spectra of two Ta-Ti bilayers on a Si wafer are measured using a soft x-ray synchrotron radiation beamline at the Photon Factory. The grazing incident x-rays are used to excite photoelectrons. The photoelectron intensity dependence is measured as the change in the glancing an