Total reflection x-ray photoelectron spe
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Jun Kawai; Makoto Sai; Tetsuro Sugimura; Kouichi Hayashi; Hisataka Takenaka; Yos
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Article
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1999
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John Wiley and Sons
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English
β 89 KB
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## X-ray photoelectron spectra of two Ta-Ti bilayers on a Si wafer are measured using a soft x-ray synchrotron radiation beamline at the Photon Factory. The grazing incident x-rays are used to excite photoelectrons. The photoelectron intensity dependence is measured as the change in the glancing an