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Surface analysis of Si/W multilayer using total reflection X-ray photoelectron spectroscopy

✍ Scribed by Jun Kawai; Kouichi Hayashi; Hiroyuki Amano; Hisataka Takenaka; Yoshinori Kitajima

Book ID
108437195
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
494 KB
Volume
88-91
Category
Article
ISSN
0368-2048

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