Written by established world experts, X-Ray Metrology in Semiconductor Manufacturing describes the applications, science, and technology of this rapidly evolving area. This book emphasizes practical metrology, with real world examples from the semiconductor and magnetics industries. The authors disc
X-ray metrology in semiconductor manufacturing
โ Scribed by David Keith Bowen; Brian Keith Tanner
- Publisher
- CRC Press / Taylor & Francis
- Year
- 2006
- Tongue
- English
- Leaves
- 273
- Category
- Library
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
<P>Identifying and measuring the elemental x-rays released when materials are examined with particles (electrons, protons, alpha particles, etc.) or photons (x-rays and gamma rays) is still considered to be the primary analytical technique for routine and non-destructive materials analysis. The Lith
Fewster (Philips Analytical Research Center, UK) discusses the X-ray scattering methods used for the structural analysis of a range of semiconductor materials, emphasizing those structural properties that influence physical properties. The text covers the basic structural characteristics of material
<p>X-ray Absorption Spectroscopy (XAS) is a powerful technique with which to probe the properties of matter, equally applicable to the solid, liquid and gas phases. Semiconductors are arguably our most technologically-relevant group of materials given they form the basis of the electronic and photon