Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and c
Semiconductor Strain Metrology
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โฆ Table of Contents
01 Title.pdf......Page 1
02 Cover Page......Page 2
03 REVISED eBooks End User License Agreement-Website......Page 3
04 Dedication......Page 4
05 Content......Page 5
06 Foreword......Page 6
07 Preface......Page 7
08 Part 01......Page 8
09 Chapter 01......Page 9
10 Chapter 02......Page 20
11 Part 2......Page 32
12 Chapter 03......Page 33
13 Chapter 04......Page 43
14 Chapter 05......Page 55
15 Part 03......Page 64
16 Chapter 06......Page 65
17 Chapter 07......Page 75
18 Chapter 08......Page 85
19 Part 04......Page 95
20 Chapter 09......Page 96
21 Chapter 10......Page 107
22 Chapter 11......Page 117
23 Conclusion and Outlook......Page 131
24 Appendix......Page 134
25 Index......Page 137
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A complete reference on silicon semiconductor metrology. Contains nearly 1300 references, more than 300 equations, and nearly 500 drawings, photographs and micrographs. Explains run-to-run and real-time control, considers how to improve physical measurement methods to meet more exact requirements, a
Written by established world experts, X-Ray Metrology in Semiconductor Manufacturing describes the applications, science, and technology of this rapidly evolving area. This book emphasizes practical metrology, with real world examples from the semiconductor and magnetics industries. The authors disc