X-Ray Diffuse Scattering from Self-Organized Mesoscopic Semiconductor Structures

✍ Scribed by Dr. Martin Schmidbauer (auth.)

• Publisher: Springer-Verlag Berlin Heidelberg
• Year: 2004
• Tongue: English
• Leaves: 199
• Series: Springer Tracts in Modern Physics 199
• Edition: 1
• Category: Library

✦ Synopsis

This monograph represents a critical survey of the outstanding capabilities of X-ray
diffuse scattering for the structural characterization of mesoscopic material systems. The mesoscopic regime comprises length scales ranging from a few up to some hundreds of nanometers. It is of particular relevance at semiconductor layer systems where, for example, interface roughness or low-dimensional objects such as quantum dots and quantum wires have attracted much interest. An extensive overview of the present state-of-the-art theory of X-ray diffuse scattering at mesoscopic structures is given followed by a valuable description of various experimental techniques. Selected up-to-date examples are discussed. The aim of the present book is to combine aspects of self-organized growth of mesoscopic structures with corresponding X-ray diffuse scattering experiments.

✦ Table of Contents

A Brief Introduction to the Topic....Pages 1-6
Basic Principles of X-Ray Diffuse Scattering from Mesoscopic Structures....Pages 7-68
Experimental Optimization....Pages 69-94
A Model System: LPE SiGe/Si(001) Islands....Pages 95-126
Dynamical Scattering Effects at Grazing Incidence Conditions....Pages 127-138
Characterization of Quantum Dots....Pages 139-164
Characterization of Interface Roughness....Pages 165-186
Appendix....Pages 187-198
Index....Pages 199-202

✦ Subjects

Optical and Electronic Materials; Condensed Matter Physics