𝔖 Bobbio Scriptorium
✦   LIBER   ✦

X-ray diffraction imaging investigation of silicon carbide on insulator structures

✍ Scribed by S. Milita; Y. Le Tiec; E. Pernot; L. Di Cioccio; J. Härtwig; J. Baruchel; M. Servidori; F. Letertre

Publisher
Springer
Year
2002
Tongue
English
Weight
245 KB
Volume
75
Category
Article
ISSN
1432-0630

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Defect transformation study in silicon-o
Defect transformation study in silicon-on-insulator structures by high-resolution X-Ray diffraction
✍ V.P. Popov; I.V. Antonova; J. Bak-Misiuk; J. Domagala 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 130 KB

Silicon-on-insulator (SOI) structures were fabricated by bonding using a new variant of Smart-Cut technology. Asbonded SOI structures are annealed at high temperature (11008C) for removal of hydrogen, radiation defects and stresses at the bonding interface. The transformation of structural parameter