X-ray Absorption Spectroscopy To Probe Surface Composition and Surface Deprotection in Photoresist Films

✍ Scribed by Lenhart, Joseph L.; Fischer, Daniel A.; Sambasivan, Sharadha; Lin, Eric K.; Jones, Ronald L.; Soles, Christopher L.; Wu, Wen-li; Goldfarb, Dario L.; Angelopoulos, Marie

• Book ID: 127083152
• Publisher: American Chemical Society
• Year: 2005
• Tongue: English
• Weight: 303 KB
• Volume: 21
• Category: Article
• ISSN: 0743-7463
• DOI: 10.1021/la047160z