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Wetting and superhydrophobic properties of PECVD grown hydrocarbon and fluorinated-hydrocarbon coatings

โœ Scribed by D.K. Sarkar; M. Farzaneh; R.W. Paynter

Book ID
104001758
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
272 KB
Volume
256
Category
Article
ISSN
0169-4332

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Nanosphere lithography (NSL) masks were created by spin-coating of polystyrene particles onto silicon surfaces. Fluorinated hydrocarbon films were coated on the nanosphere lithography masks using plasma-enhanced chemical vapor deposition (PECVD) to obtain ordered arrays of fluorinated hydrocarbon. A