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Infrared and Optical Properties of Amorphous Fluorinated Hydrocarbon Films Deposited with the Method of ECR Plasma

โœ Scribed by Yu, Xin; Shenhua, Xu; Zhaoyuan, Ning; Jun, Chen; Xinhua, Lu; Suliu, Xiang; Song, Huang; Wei, Du; Shanhua, Cheng


Book ID
120361125
Publisher
IOP Publishing
Year
2004
Tongue
English
Weight
442 KB
Volume
6
Category
Article
ISSN
1009-0630

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