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Waveguiding properties of Er-implanted silicon-rich oxides

✍ Scribed by R.G. Elliman; M. Forcales; A.R. Wilkinson; N.J. Smith


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
793 KB
Volume
257
Category
Article
ISSN
0168-583X

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## Abstract We compare optical and structural properties of silicon‐rich silicon oxide (SiO~__x__~, __x__∼1.8) films obtained by ion implantation and molecular beam deposition (MBD). Before annealing, amorphous clusters (β‰₯2 nm) are present in the MBD samples whereas these are absent for ion implant