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Wafer-scale silicon nanopillars and nanocones by LangmuirâBlodgett assembly and etching

✍ Scribed by Hsu, Ching-Mei; Connor, Stephen T.; Tang, Mary X.; Cui, Yi

Book ID: 121245824
Publisher: American Institute of Physics
Year: 2008
Tongue: English
Weight: 769 KB
Volume: 93
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2988893

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