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Multiform structures with silicon nanopillars by cesium chloride self-assembly and dry etching

✍ Scribed by Yuan-xun Liao; Jing Liu; Bo Wang; Fu-ting Yi

Book ID: 116244536
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 881 KB
Volume: 257
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2011.07.014

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