Fabrication of ordered silicon nanopilla
Fabrication of ordered silicon nanopillars and nanowires by self-assembly and metal-assisted etching
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Boarino, Luca ;Imbraguglio, Dario ;Enrico, Emanuele ;De Leo, Natascia ;Celegato,
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Article
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2011
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John Wiley and Sons
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English
⚖ 611 KB
## Abstract Silicon nanowires (SiNWs) and nanopillars have been obtained by metal‐assisted etching (MAE), starting from silver thin films deposited by thermal evaporation and sputtering on silicon substrates. Different deposition methods and thickness are strongly affecting spatial distribution and