𝔖 Bobbio Scriptorium
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Visualization of 3D-SIMS measurements

✍ Scribed by H. Hutter; K. Nowikow; K. Gammer


Book ID
108417465
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
144 KB
Volume
179
Category
Article
ISSN
0169-4332

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In order to provide an accurate rendition of a three-dimensional (3D) volume obtained by SIMS, it is necessary to take account of the topography of the original surface and the relative sputter rates of the di †erent structures within the volume. We describe a method that corrects both distortions t