In this paper, the effect of thermoelastic coupling on a micro-machined resonator is studied. The calculated results show that the frequency shift ratio caused by thermoelastic coupling is of the order of 10 ร3 , which is much larger than that of air-damping. Furthermore, the non-dimensional frequen
โฆ LIBER โฆ
Vibration analysis of micro-machined beam-type resonators
โ Scribed by P.A. Hassanpour; W.L. Cleghorn; E. Esmailzadeh; J.K. Mills
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 431 KB
- Volume
- 308
- Category
- Article
- ISSN
- 0022-460X
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