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Thermoelastic coupling effect on a micro-machined beam resonator

✍ Scribed by F.L. Guo; G.A. Rogerson

Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
91 KB
Volume
30
Category
Article
ISSN
0093-6413

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✦ Synopsis

In this paper, the effect of thermoelastic coupling on a micro-machined resonator is studied. The calculated results show that the frequency shift ratio caused by thermoelastic coupling is of the order of 10 Γ€3 , which is much larger than that of air-damping. Furthermore, the non-dimensional frequency is scale-dependent with thermoelastic coupling being considered. In contrast, the non-dimensional frequency only depends upon the ratio of thickness to length when the themoelastic coupling effect is disregarded.

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