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Variable-energy positron beam study of arsenic diffusion in poly-silicon

✍ Scribed by D.W. Lawther; R. Khatri; P.J. Simpson; P.J. Schultz; I. Calder; L. Weaver

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 431 KB
Volume: 85
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(94)00341-6

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