A positron beam study of vacancy–impurity complexes in inert gas ion-implanted silicon

✍ Scribed by M. Fujinami; T. Miyagoe; T. Sawada; R. Suzuki; T. Ohdaira; T. Akahane

• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 218 KB
• Volume: 340-342
• Category: Article
• ISSN: 0921-4526
• DOI: 10.1016/j.physb.2003.09.153