๐”– Bobbio Scriptorium
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Variable angle XPS investigation of lubricant films coated on sputtered carbon

โœ Scribed by G. T. K. Swami


Book ID
104592256
Publisher
John Wiley and Sons
Year
1989
Tongue
English
Weight
364 KB
Volume
14
Category
Article
ISSN
0142-2421

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A sample oscillation module linked to a nanoindentation unit was used to perform nano-scale wear testing on a series of sputtered Cr doped amorphous C films deposited over a range of thicknesses (10, 20, 50, 150, and 2000 nm) under conditions relevant to MEMS and micro-scale engineering devices. A r