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Evaluation of the effect of surface roughness on thin film thickness measurements using variable angle XPS

✍ Scribed by Y.L. Yan; M.A. Helfand; C.R. Clayton

Book ID: 107925778
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 461 KB
Volume: 37
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90500-x

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