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Vapour phase in-situ etch of (100) GaAs substrates

✍ Scribed by C. Pelosi; G. Attolini; G. Salviati

Book ID: 113299085
Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 426 KB
Volume: 9
Category: Article
ISSN: 0254-0584
DOI: 10.1016/0254-0584(82)90014-1

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