✦ LIBER ✦
Photoreflectance investigation of dry-etch-induced damage in semi-insulating GaAs substrates
✍ Scribed by M. Murtagh; P.V. Kelly; P.A.F. Herbert; M. O'Connor; G. Duffy; G.M. Crean
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 267 KB
- Volume
- 63
- Category
- Article
- ISSN
- 0169-4332
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