Vacuum-ultraviolet blazed silicon grating anisotropically etched by native-oxide mask

✍ Scribed by Sheng, Bin; Xu, Xiangdong; Liu, Ying; Hong, Yilin; Zhou, Hongjun; Huo, Tonglin; Fu, Shaojun

• Book ID: 115431736
• Publisher: Optical Society of America
• Year: 2009
• Tongue: English
• Weight: 292 KB
• Volume: 34
• Category: Article
• ISSN: 0146-9592
• DOI: 10.1364/OL.34.001147