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Vacuum arc deposition of thin films from an LaB6 cathode

✍ Scribed by S. Schmidbauer; H. Klose; A. Ehrlich; M. Friedrich; M. Röder; F. Richter


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
484 KB
Volume
82
Category
Article
ISSN
0257-8972

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