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Deposition of nanocomposite Zr–ZrO2 films by reactive cathodic vacuum arc evaporation

✍ Scribed by J. Čyvienė; M. Laurikaitis; J. Dudonis

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
226 KB
Volume
118
Category
Article
ISSN
0921-5107

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Synthesis of anatase TiO2 film by reacti
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✍ Hirofumi Takikawa; Tsuyoshi Sasaoka; Tateki Sakakibara 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 484 KB

TiO 2 in anatase crystalline structure has strong photocatalysis. In this paper, TiO 2 films are deposited on sodaglass substrate using a Ti cathode vacuum arc with O 2 flow. Experimental conditions are as follows: arc current, 50 A; pressure, 0.3 and 1.0 Pa; O 2 flow rate, 20 ml/min; cathode substr