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Vacuum annealing effects on structural and electrical properties of reactively evaporated indium tin oxide

โœ Scribed by Dinh, N. N. ;Bich, V. T. ;Hoang, N. H. ;Hoai, T. X. ;Quynh, V. N. ;Chanh, N. V.

Publisher
John Wiley and Sons
Year
1988
Tongue
English
Weight
221 KB
Volume
106
Category
Article
ISSN
0031-8965

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Effect of substrate temperature on the e
Effect of substrate temperature on the electrical and optical properties of reactively evaporated indium tin oxide films
โœ N. Balasubramanian; A. Subrahmanyam ๐Ÿ“‚ Article ๐Ÿ“… 1988 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 175 KB

Electrical and optical properties of indium tin oxide films coated on soda-lime glass substrates have been investigated as a function of substrate temperature (~ = 250-450 ยฐC). Highly conducting (p-~8xlO -4 ยฃ2 cm) and transparent (T-~90%) films have been obtained at a substrate temperature of 350 ยฐC