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Vacancy related defect profiles in MeV cluster-ion irradiated silicon

✍ Scribed by A. Hallén; P. Håkansson; N. Keskitalo; J. Olsson; A. Brunelle; S. Della-Negra; Y. Le Beyec

Book ID: 113286822
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 355 KB
Volume: 106
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(95)00709-1

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