Micro drilled โvia holesโ in III-V semic
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Adarsh Sandhu
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Article
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2005
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Elsevier Science
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English
โ 587 KB
Micro drilled 'via holes' in III-V semiconductors Etching backside via-holes in III-V semiconductors is a critical step in the process of fabricating Monolithic Microwave Integrated Circuits (MMIC), used for mixing, amplification and tuning signals in portable telephones and related communications e