✦ LIBER ✦
Analysis of materials modifications caused by UV laser micro drilling of via holes in AlGaN/GaN transistors on SiC
✍ Scribed by Tim Wernicke; Olaf Krüger; Martin Herms; Joachim Würfl; Holm Kirmse; Wolfgang Neumann; Thomas Behm; Gert Irmer; Günther Tränkle
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 834 KB
- Volume
- 253
- Category
- Article
- ISSN
- 0169-4332
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