Using Langmuir probes to measure the plasma decay rates in pulsed RF magnetron discharges

✍ Scribed by Bäcker, H; Bradley, J W; Kelly, P J; Arnell, R D

• Book ID: 121439843
• Publisher: Institute of Physics
• Year: 2001
• Tongue: English
• Weight: 375 KB
• Volume: 34
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/34/18/301